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Crystal Growth Processes Based on Capillarity: Czochralski, Floating Zone, Shaping and Crucible Techniques
Duffar, Thierry
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Últimas novedades química general
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The demand for large, high-quality single crystals has increased rapidly as a result of the growing semiconductor and optics industry, where perfect single crystals are used as substrates or components for devices.
Crystal Growth Processes Based on Capillarity covers all crystal growth techniques and explains why and how they are dependent on liquid surface phenomena, or capillarity. Each chapter addresses fundamental capillary effects, detailed experimental developments, technically important processes, and associated software. The book includes:
Basic principles of capillarity, wetting and growth angle data and detailed mathematical treatments Shape stability in capillary crystal growth, including Verneuil and Czochralski techniques Czochralski process dynamics and control Floating Zone crystal growth Shaped crystal growth of silicon and sapphire, micro-pulling down techniques Vertical Bridgman and dewetting processes Marangoni convection in crystal growth
With over 25 years experience, Duffar brings together a good balance of theory and experimental techniques, making this a resource for all crystal growers in both research and in industry.
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Preface Acknowledgements
Nomenclature
List of Contributors
1. Basic Principles of Capillarity in Relation with Crystal Growth
N. Eustathopoulos and B. Drevet
1.1 Introduction
1.2 Definitions
1.3 Contact Angles
1.4 Growth angles
Acknowledgments
References
2. Shape Stability in Capillary Crystal Growth as Possibility and Practical Realization of Shaped Crystals
V. A. Tatartchenko
2.1 Introduction
2.2 Crucible-less Crystal Growth – Capillary Shaping Techniques (CST)
2.3 Dynamic Stability of Crystallization- the Basis of Shaped Crystal Growth by CST
2.4 Stability Analysis and Growth of Shaped Crystals by the Cz Technique
2.5 Stability Analysis and Growth of Shaped Crystals by the Verneuil technique
2.5. Stability Analysis and Growth of Shaped Crystals by the FZ Technique
2.6. TPS-Capillary Shaping
2.7 Brief presentation of shaped Ge, sapphire, Si, and Metal growth
2.8 TPS Peculiarities
References
3 Czochralski Process Dynamics and Control Design
Jan Winkler, Michael Neubert, Joachim Rudolph, Ning Duanmu and Michael Gevelber
3.1 Introduction and motivation
3.2 Czochralski control approaches
3.3 Mathematical model
3.4 Process Dynamics Analysis for Control
3.5 Conventional control design
3.6 Geometry based nonlinear control design
3.7 Advanced Techniques
References
4 Floating Zone Crystal Growth
Anke Lüdge, Helge Riemann, Michael Wünscher, Günter Behr, Wolfgang Löser, Andris Muiznieks and Arne Cröll
4.1 Introduction
4.2 FZ Processes with RF Heating
4.3 Floating Zone Growth with Optical Heating
4.4 Numerical Analysis of the Needle-eye Floating Zone Process
References
5 Shaped Crystal Growth
V. N. Kurlov, S. N. Rossolenko, N. V. Abrosimov and K. Lebbou
5.1 Introduction
5.2 Shaped Silicon
5.3 Sapphire Shaped Crystal Growth
5.4. Shaped crystals grown by micro-pulling down technique (µ-PD)
5.5 Conclusions
References
6 Vertical Bridgman and Dewetting
Thierry Duffar and Lamine Sylla
6.1 Introduction
6.2 Peculiarities and Drawbacks of the Bridgman Processes
6.3 Full Encapsulation
6.4 The Dewetting Process: a Modified Vertical Bridgman Technique
6.5 Conclusion and Outlook
References
7 Marangoni Convection in Crystal Growth
Arne Cröll, Taketoshi Hibiya, Suguru Shiratori, Koichi Kakimoto and Lijun Liu
7.1 Introduction
7.2 Thermocapillary Convection in Float Zones
7.3 Thermocapillary Convection in Czochralski Crystal Growth of Silicon
7.4 Thermocapillary Convection in EFG Setups
7.5 Thermocapillary Convection in Bridgman and Related setups
7.6 Solutocapillary Convection
References
8 Mathematical and Numerical Analysis of Capillarity Problems and Processes
Liliana Braescu, Simona Epure, Thierry Duffar
8.1 Introduction
8.2 Mathematical formulation of the capillary problem
8.3 Analytical and numerical solutions for the meniscus equation in the case of Cz method
8.4 Analytical and numerical solutions for the meniscus equation in the case of the EFG method
8.5 Analytical and numerical solutions for the meniscus equation in the case of Dewetted Bridgman method
8.6 Conclusions
Appendix
References
Index
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