Comprehensive Microsystems, is a new 3-volume reference work on Microelectromechanical Systems (MEMS). MEMS are defined as micron-sized devices that sense or manipulate a physical environment. These tiny devices are used in a wide range of applications, from airbag sensors in automobiles to laserjet printer heads and blood pressure monitors.


Research into MEMS is continually evolving. Given the diverse range of applications and the increased use of MEMS in everyday appliances there is a very definite demand for a comprehensive and up-to date reference into these devices. Comprehensive Microsystems will fill this gap by facilitating access to established research by both academics and professionals in the field. This work is designed to be both an essential reference tool for those entering the field as well as a useful handbook for MEMS researchers in the various industries in which these tiny devices are used

Materials
Biocompatible Materials, Silicon and Related Materials, Compound Semiconductors, Polymers, Plastics and Gels, Harsh Environment, Metals and Alloys

Fabrication and Packaging
Silicon Process Integration, Bonding, Dry Etching, Electroplating, Low-Cost MEMS Technologies, LIGA, Machining, Micro/Nanoimprinting, Replication, Wet Etching of Silicon-Related Materials, Automated or Self-Assembly, Packaging, Device Reliability/Lifetime

Design
Design Synthesis, Multiphysics and Multiscale Simulation, Sensor Networks & Distributed Systems, Testing, Calibration and Compensation

Optical Systems
Artificial Retina, Diffractive Optics, Integrated Optics, IR Imaging, Micro-Imaging Systems, Micro-Mirrors, Micro-Lenses, MuOCT, Optical Communications, Photonic Crystals

Chemical and Biological Systems
Gas Sensing System, Lab-on-a-Chip, Biophotonics, Tissue Engineering, Micro-Pumps-Liquid Pumps, Micro-Pumps-Gas Pumps, Mixers, Chemical Sensing Systems for Liquids, Capacitive Ultrasonic Transduction

Emerging Topics
SPM, MEMS Atomic Clocks, Micro-combustion, Micro-Coolers, Water Management in Micro-Fuel Cell Systems, Molecular Motors

Physical Sensors
Accelerometers, Flow Sensors, Gyros, Pressure Sensors

Actuation
Electrostatic Actuation, Magnetic Actuation, Resonators, Oscillators, and Frequency References Thermal Actuation, Ink jets

Electronics for MEMS
Distributed Systems, Interface Circuits, Micro-Imaging Systems, Micro-Mirrors, Micro-Lenses, MuOCT Optical Communications, Photonic Crystals