Unique in its coverage of this select area, this book focuses on providing a unified overview of the rapidly emerging field of micro/nano system modeling and control. It gives managers, researchers, and graduate students easy access to the expert contributors’ cutting-edge knowledge and skills in this crucial field. The editors present an especially wide-ranging overview, covering topics as diverse as systems biology and sensors. The book also includes various case studies for modeling of micro/nano devices and systems, and explains how the models can be used for control and optimization purposes.